D. Shen, J.-H. Park, J. Ajitsaria, S.-Y. Choe, H. C. Wikle, and D.-J. Kim, “The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting,” J. Micromech. Microeng., Vol. 18, pp. 055017, (7 pp.), 2008, ISSN: 0960-1317.

D. Shen, J.-H. Park, J. Ajitsaria, S.-Y. Choe, H. C. Wikle, and D.-J. Kim, “The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting,” J. Micromech. Microeng., Vol. 18, pp. 055017, (7 pp.), 2008, ISSN: 0960-1317.

D. Shen, J.-H. Park, J. Ajitsaria, S.-Y. Choe, H. C. Wikle, and D.-J. Kim, “The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting,” J. Micromech. Microeng., Vol. 18, pp. 055017, (7 pp.), 2008, ISSN: 0960-1317.

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